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2002 RCS 300PS-M100
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Tool Status Running Wafers Wafer Size 300 mm Fab Section R&D Asset Description Semi Auto Pad S...
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2000 ECEC Micron2
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Tool Status Disconnected Wafer Size NA Fab Section Lab Asset Description Die Attach Software ...
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2010 KLA QTX-300
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Tool Status Connected Wafer Size 300 mm Fab Section Metrology Asset Description DQTX702 Softw...
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2012 Nanometrics UNIFIRE 7900-L
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Tool Status Connected Wafer Size 300 mm Fab Section Metrology Asset Description ICD2900-T ICD2...
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1999 CFM FullFlow 1/99 8100
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Tool Status Connected Wafer Size 200 mm Fab Section Clean Asset Description 8100 HP & Sulfuric...
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2003 RVSI ws3500/3800 upgrade
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Tool Status Disconnected Wafer Size 300 mm Fab Section Metrology Asset Description one inspect...
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1999 CFM Technologies FullFlow 1/99 8100
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CFM FullFlow 1/99 8100 200mm HP & Sulfuric Ozone
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2004 RVSI ws3500/3800 upgrade
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Tool Status Disconnected Wafer Size 300 mm Fab Section Metrology Asset Description RVSI VISUAL...
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1988 CFM Technologies HP 8050
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CFM CFM HP 8050 200mm Hot Process (HP)
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2015 Bruker D8 Fabline
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Tool status: online Software version: 77-2.3A-6A-5A-5A-R6A CIM: E84, SECS/GEM, GEM300 Hardware...
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2005 Entegris FOUP N2 Purge Station
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300mm FOUP N2 Purge Station, with E84 and RF Tag reader modules
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2005 TEL Lithius
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Tool status: running wafers Wafer size: 300mm Fab section: lithography Asset description: 2 bl...
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