2002 RCS 300PS-M100
2002 RCS 300PS-M100
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Description
Tool Status Running Wafers
Wafer Size 300 mm
Fab Section R&D
Asset Description Semi Auto Pad Shave Tool RSV Automation PDS01
Software Version Standard
CIM SECS GEM
Process Pad Shave Too
Specifications
| Manufacturer | RCS |
| Model | 300PS-M100 |
| Year | 2002 |
| Condition | Used |
| Stock Number | BM3688 |