2003 RVSI ws3500/3800 upgrade

Tool Status Disconnected

Wafer Size 300 mm

Fab Section Metrology 

Asset Description one inspection scanner

Software Version xp

CIM none

Process Inspection

Main System ws3500/3800 Handler System ide robot 1

Factory Interface NONE

Options System prealigner ide 1

Others ocr cameras 2

ws-3500/3800 1 

loadport B 1