2012 Nanometrics UNIFIRE 7900-L

Tool Status Connected

Wafer Size 300 mm

Fab Section Metrology

Asset Description ICD2900-T ICD2900FP NANOMETRICS

Software Version Lynx (5.6.4.3499) -- Unifre 7900IM (4.1.41.0)

CIM SECS/GEM

Process TSV / Bump Height / Wafer Bow

Main System UNIFIRE 7900-L 1

Handler System Standard Automation 1

Factory Interface FOUP 2