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2014 HMI eScan 500
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HMI eScan 500, Defect Review, 300mm Tool ID: SEI2703
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2014 LAM Research Corp. INOVA
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Vintage 2014 Wafer size: 300mm MDX83x, underutilized in FAB8, considered for FAB1 transfer Sof...
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2011 KLA AMI2900
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KLA AMI2900, 300mm KLA Advanced Macro Inspection Module Tool ID: AMI2900
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2001 Lintec RAD-2500M/8
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200mm/8" wafer mounter Tool Status Disconnected Wafer Size 200 mm Fab Section Lab Asset Descr...
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2002 RCS 300PS-M100
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Tool Status Running Wafers Wafer Size 300 mm Fab Section R&D Asset Description Semi Auto Pad S...
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HSEB Axiospect 301
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HSEB, Axiospect 301, Optical Microscope, 300mm Tool ID: OPI2900
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2000 ECEC Micron2
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Tool Status Disconnected Wafer Size NA Fab Section Lab Asset Description Die Attach Software ...
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2005 SARTORIUS LA310S
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SARTORIUS, LA310S Tool ID: IND460
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2010 KLA QTX-300
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Tool Status Connected Wafer Size 300 mm Fab Section Metrology Asset Description DQTX702 Softw...
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2012 Nanometrics UNIFIRE 7900-L
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Tool Status Connected Wafer Size 300 mm Fab Section Metrology Asset Description ICD2900-T ICD2...
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1999 CFM FullFlow 1/99 8100
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Tool Status Connected Wafer Size 200 mm Fab Section Clean Asset Description 8100 HP & Sulfuric...
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2003 RVSI ws3500/3800 upgrade
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Tool Status Disconnected Wafer Size 300 mm Fab Section Metrology Asset Description one inspect...
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