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2005 TEL Lithius
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Tool status: running wafers Wafer size: 300mm Fab section: lithography Asset description: 2 bl...
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1994 KLA Surfscan 6200 Particle Counter
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8" - 0.1 micron Defect Sensitivity (PSL STD) - 0.02 ppm Haze Sensitivity - 0.002 ppm Haze Reso...
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NIKON NSR-i14E
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Description L W H Qty Main Body 90 78 100 1 Front Loader Unit 75 35 100 1 Refrigeration 84 35 ...
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NIKON NSR-i14E
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Description L W H Qty Main Body 92 85 100 1 Front Loader Unit 87 33 100 1 Refrigeration 85 38 ...
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1997 NIKON NSR-i14E
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Altitude Sea Level Resolution 0.35 um Computer Type Vax Station with Expansion Unit Software M...
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1997 Voetsch Climate Chamber VC 4020
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Volume: 200 Liter Test room: 575 x 550 x 645 mm (W x D x H) Temperature: -40°C to +180°C Heati...
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AMAT P5000 Metal Etch
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150mm Through the wall installation Independent He Cooling Phase III Robot Phase III Cassette...
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AMAT ENDURA 5500
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150mm Narrow Body Load Lock Through the Wall Installation Water cooled Cryo compressor MFC: S...
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AMAT P5000 RIE
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RIE 150mm SiO2, SiNx & Si 2 chambers with full gas panel Computerized endpoint system ESC wa...
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2008 TEL Indy IRAD
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Tool Status Running Wafers Wafer Size 300 mm Fab Section Diffusion Asset Description TEL Furna...
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2006 TEL Lithius
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Tool Status Connected Wafer Size 300 mm Fab Section Lithography Asset Description Coat only To...
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2009 ASM ASM3200
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Tool Status Connected Size 300 mm Fab Section Diffusion Asset Description Epsilon3200 Single W...
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