1997 NIKON NSR-i14E

Altitude Sea Level

Resolution 0.35 um

Computer Type Vax Station with Expansion Unit

Software MCSV 3.46A, OCSV 3.46, Tool 4.04

Reticle size 6 inch

Movable Microscopes Fixed

Wafer size 8 Inch Notch

Illuminator Type 2.5 kW

Shrinc  Shric 4

Moveable NA Yes

Reticle Libraries 3

PPD Yes

Bar code reader Yes

Wafer loader indexers 2

Wafer loader type Type 3

Wafer Loader Prealignment 2 Non Contact

Wafer Loader In Line Right

FIA Yes

LSA Yes

Chip levelling Yes

Autococus Yes

VRA Yes

FC2 Yes

Basic Flat Plate Yes

AIS Yes

Ceramic 3 pin ring chuck Yes

Description L W H Qty 

Main Body 90 80 100 1

Front Loader Unit 80 33 100 1

Refrigeration 83 35 100 1

Control Rack 35 51 93 1

MLTC 35 43 95 1

Wafer Loader Unit 48 21 40 1

Pallet-1 : Misc parts 78 44 32 1