- Wafer Shape: Notch - SMIF Interface: Yes - Cassette Loader: LPI 2200 - Loadlock Indexer Robo...

Vintage: 2017 Option: BBD, NCS Working hours: 2457 hours Good condition Spindle: 1.8kw

Vintage: 2013 Option: BBD, NCS Working hours: 8500 hours Good Condition Spindle: 18kw

Running in line Conversion kit included so can be 8" and 12" Size 1,650(W) x 1,420(D) x 1,800(H...

Running in line Conversion kit included so can be 8" and 12" Size 1,650(W) x 1,420(D) x 1,800(H...

Running in line Conversion kit included so can be 8" and 12" Size: 1,650(W) x 1,420(D) x 1,800(...

Running in line Conversion kit included so can be 8" and 12" SIZE 1,650(W) x 1,420(D) x 1,800(H...

- Upgraded from 6220 to 6420 - Refurbished in 2016

2005