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KLA-Tencor Surface 6220/6420
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Particle counter
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KLA-Tencor P-22/ HRP220/ P-170
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Wafer inspection system
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NanoSpec Nano-8000
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Film Thickness Measurement
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Mattson ICP or Tride
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PR stripper
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TEL Mark 8
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Suss Mask Alinger
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i-line stepper 2um
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Nikon NSR-2005
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i-Line stepper 0.45um
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Canon MPA-500FAb
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Canon MPA-500FAb
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5" DR Mask 3 available
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QUARTZ Wafer
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