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2006 Hitachi Kokusai DJ-1223VN LP-CVD
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Process: HTO Vintage: 2006
Details
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2015 Hitachi Kokusai Quixace DJ-1223VN 300mm LP-CVD
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Process: HTO Vintage: 2015
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2001 Hitachi Kokusai VR120SD
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Process: Resistivity Measurement Wafer size: 8, 12" Condition: as is
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NANOMETRICS Nano 9010B
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Process: thickness measurement Wafer size: 12" Condition: as is
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CARL ZEISS AXIOVERT 200M MAT
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Process: microscope Wafer size: multi Condition: as is
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BAL-TEC (Gartan) SCD005
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Process: sputter coater Condition: working Wafer size: multi
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TECDIA TEC-3005KD
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Process: CHIP breaking M/C Condition: as is Wafer size: 8"
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CARL ZEISS AXIOVERT 200M MAT
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Process: microscope Condition: as is Wafer size: multi
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2001 Hitachi Kokusai VR120/ 08S
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Process: resistivity measurement Wafer size: 12" Condition: as is
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SVS MSX-1000
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Process: lift off M/C Condition: as is Wafer size: 4"
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BAL-TEC (Gartan) SCD005
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Process: sputter coater Condition: working Wafer size: multi
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2009 SEMILAB WT-2000PVN
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Process: lifetime measurement Condition: complete
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