TEOS/HF/F2

Profilometer Metrology Equipment Equipment details: Date of Manufacture: Currently Configured...

SEED Poly 12" As-is

LT ALD SiN Furnace Wafer size: 12" Condition: as is

NH3, DCS, (SiGe), C2H4, HF, 20%F2 with N2, TiCl3 Liquid Furnace Wafer size: 12" Condition: as is

N2O, NH3, SiH2Cl2, SiH4, PAC module 2007 As-is Wafer size 12"

D-Poly Wafer size: 12" Condition: as is

D-Poly Wafer size: 12" Condition: As-is, Initialed Included HDD

D-Poly Furnace Wafer size: 12" As-is, Initialed HDD included

Parts It come up with an error when tool powers up. Please see the picture attached. It many nee...

Comes with: optional antivibration table computer monitor manuals. 2021 Vintage

- issue with the transmitted detector 2012 Vintage