12" As-is Batch wafer processing

2003 Comet Wafer Transfer Spare Parts

NOVELLUS, INOVA NEXT, 300mm Tool ID: MDX2951

Entegris, FOUP N2 Purge Station, 300mm

Semi Auto

EBARA F-REX300, 300 mm, Cu CMP Polish Tool ID: ED05

AXCELIS, AXCELIS INTEGRA ES 3CH / INT340, Tool ID: PSX4603

AMAT SEM G5 MAX, 300mm SEM G5 MAX Defect Review Vacuum tool Tool ID: SEM2500

TEL, ACT12, 300mm Will be going to warehouse in May 2023. Tool ID: LATK701

TEL/FSI Orion, 300mm, DYD2 Tool ID: DYD2

AMAT, Producer SE Twin chamber, 300mm, Tool ID: CVD851CHC

- Single Wafer Process - Single Rotometer Controlled Gas Channel - Multi-Step Process Cycle Capab...