1987 AG ASSOCIATES Heatpulse 410 Benchtop Rapid Thermal Annealing Tool
1987 AG ASSOCIATES Heatpulse 410 Benchtop Rapid Thermal Annealing Tool
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Description
- Single Wafer Process
- Single Rotometer Controlled Gas Channel
- Multi-Step Process Cycle Capability
- Programmable Ramp-Up Rates from 10ºC-250ºC/sec.
- 450 - 1150ºC Recommended Operating Temp Range; 1,250ºC Peak Temperature
- Thermocouple Temperature Control
- 1-300 Seconds Processing Cycle
- PC Controller with pCat Software
- 208V, 3Ph, 60Hz, 90A Input Power
Specifications
Manufacturer | AG ASSOCIATES |
Model | Heatpulse 410 Benchtop Rapid Thermal Annealing Tool |
Year | 1987 |
Condition | Used |
Stock Number | GOD23082019720221952 |