1987 AG ASSOCIATES Heatpulse 410 Benchtop Rapid Thermal Annealing Tool

1987 AG ASSOCIATES Heatpulse 410 Benchtop Rapid Thermal Annealing Tool

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Description

  • Single Wafer Process
  • Single Rotometer Controlled Gas Channel
  • Multi-Step Process Cycle Capability
  • Programmable Ramp-Up Rates from 10ºC-250ºC/sec.
  • 450 - 1150ºC Recommended Operating Temp Range; 1,250ºC Peak Temperature
  • Thermocouple Temperature Control
  • 1-300 Seconds Processing Cycle
  • PC Controller with pCat Software
  • 208V, 3Ph, 60Hz, 90A Input Power


Specifications

ManufacturerAG ASSOCIATES
ModelHeatpulse 410 Benchtop Rapid Thermal Annealing Tool
Year1987
ConditionUsed
Stock NumberGOD23082019720221952