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LAM A6 9600PTX
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2020 Karl Suss MA 200 Gen 3 Mask Aligner
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- 3 Phase - Power: 5.5 kVA - N2: 0.2 MPa - CDA: 0.45 Mpa - 50/60 Hz - 400V 2020 Vintage
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CxSemi Optiprofiler
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Resist film thickness
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CxSemi CWL680
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Microscope (review station)
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KLA- Tencor RS75
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RS meter
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KLA-Tencor Surface 6220/6420
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Particle counter
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KLA-Tencor P-22/ HRP220/ P-170
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Wafer inspection system
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NanoSpec Nano-8000
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Film Thickness Measurement
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Mattson ICP or Tride
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PR stripper
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TEL Mark 8
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2C2D Coater/ developer
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Dummy wafers 8 inch
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8inch Si Wafer - Growth Method: CZ - Type: P/B - Crystal Orientation: <100>±1 - Notch: SEMI S...
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Suss Mask Alinger
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i-line stepper 2um
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