FEI NanoLab 1200 AT DualBeam FIB-SEM

- IXL120 Pump

- (2) X-Max Detectors, 80 mm HASKRIS Chiller

- Oxford INCA Integration Kit

- Integrated plasma cleaner

- Elstar Electron column

- TLD In-Lens detector

- Modes: SE, BSE

- Tomahawk ion column

- ICE Ion detector

- Eucentric stage, 300 mm

- Power line conditioner

- High-throughput wafer carrier Kit, (200 mm - 300 mm)

- Carbon deposition precursor

- S2 Compliant, 60 Hz

- High-frequency EMI Cancellation system (SC26)

- High-resolution optical microscope

- IFAST Pro

- IFAST Semiconductor wafer navigation

- INCA Energy 250

- Insulator-enhanced etch precursor

- MultiChem Gas delivery system

- Tungsten deposition precursor

- (2) 16:10 LCD Monitors, 24"

- Manual load / unload

- UI Table

- Workstation

- Joystick

- PC

- Operating system: Windows XP Manuals

- Does not include EFEM