2005 TEL Lithius

Year of Manufacture 2005

Wafer size 300mm

Tool Status Running Wafers

Fab Section Lithography

Asset Description 2-Block-Machine

Software Version 300.0.130.2

CIM SECS

Process Coat, Development

Main System Lithius 2-Block 1 OK

Handler System TEL robot (CRA/PRA_3x/IRAM/IRAS) OK

Factory Interface FOUP 5

Coater Cabinet 1 OK

Temp./ Hum.Controller 2 OK

Resist Cabinet 1 OK

Developer Cabinet 1 OK

PowerBox 1