AMAT Centura EPI
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AMAT Centura EPI
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Description
Centura HTF EPI 3ch ATM, 200mm, s/n H046 system for sale As Is Complete and “Power On”.
- 480V/50Hz/600A
‐ Centura HTF Toxic Epi mainframe
‐ Centura HTF Controller
- Flat panel monitor
- Widebody loadlocks
‐ Wafer mapping
‐ HP robot
‐ Remote center finding
‐ Chamber Position: A, B, C - EPI ATM (Atmospheric)
* Upper lamp module
* Lower lamp module
* AccuSETT Flowpoint Controller and Handheld
* AccuSETT valve
* Variable Speed Blower
* R3.4 Rotation Assy
‐ Legacy gas panel
‐ Chamber Position F: Single -Slot Non-contact cooldown
Specifications
Manufacturer | AMAT |
Model | Centura EPI |
Condition | Used |
Stock Number | BM4004 |