AMAT Centura EPI

Centura HTF EPI 3ch ATM, 200mm, s/n H046 system for sale As Is Complete and “Power On”.

- 480V/50Hz/600A

‐ Centura HTF Toxic Epi mainframe

‐ Centura HTF Controller

- Flat panel monitor

- Widebody loadlocks

‐ Wafer mapping

‐ HP robot

‐ Remote center finding

‐ Chamber Position: A, B, C - EPI ATM (Atmospheric)

* Upper lamp module

* Lower lamp module

* AccuSETT Flowpoint Controller and Handheld

* AccuSETT valve

* Variable Speed Blower

* R3.4 Rotation Assy

‐ Legacy gas panel

‐ Chamber Position F: Single -Slot Non-contact cooldown