TEL Alpha 8 SE Vertical Furnace

This system has been refurbished by TEL in 2018, the full configuration is linked below. The unit is fully functional and has PAC to prevent cracking

a. Qty: 1b. Base unit ONO process.c. Type I deep bay framed. Waves controllere. Wafer Diameter: 200 mmf. Load: 170 slot boat (150 wfr load size) with boat rotationg. Heater element: 500C – 1000Ch. Process gases: NH3, DCS, N2O, N2