Hitachi S 3000 N Scanning Electron Microscope (SEM)

- Variable Pressure (Low Vacuum)

- 6" Stage

- Windows XP Operating System

- HP DC 7600

- Software Options:

   - Measurement

   - PCI Interface (Image management)

   - H.R. Image Memory

   - SEM Data Management

   - Full Screen

- 5 Axis Stage

- 4 Quadrant Backscatter Detector

- ESED (AED) Advanced Detector

- Option to add EDX for an additional cost

Specifications:

1. Resolution:

- Secondary electron image resolution: 3.0 nm  (High Vacuum Mode)

15 nm  (Accelerating voltage 3kV)

2. Magnification:

- 15x to 300,000x (65 steps) Normal mode

- 5x to 300,000x (75 steps) Low mag mode

-(x5 : WD = 35 mm, Accelerating voltage 2kV)

3, Electron Optics:

   (1) Filament: Pre-centered tungsten hairpin type

   (2) Gun bias: Self-bias + continuously variable bias

   (3) Accelerating voltage:

       -0.3 to 30 kV (1171 steps)

       -0.3 to 9.99 kV (in increments of 10 V)

       -10 to 30 kV (in increments of 0.1 kV)

   (4) Emission current: 10^-12 to 10^-7 A

   (5) Gun Alignment: 2-stage electromagnetic alignment

   (6) Condenser lens: 2-stage electromagnetic condenser

   (7) Objective lens: Super-conical lense

   (8) Objective lens aperture: 4-opening movable aperture

   (9) Stigmator coil: 8-pole electromagnetic X/Y correction for astigmatism

   (10) Image shift: ± 20 μm or more (W.D. = 15 mm)

4. Specimen Stage

   One of the following five types of specimen stages is selectable.

   (a) Super-eucentric stage

      Movement range: 32 mm x 32 mm

      Tilt angle: -90° to +90°

      Rotation angle: 360°

   (b) Standard stage

      Movement range: 80 mm x 40 mm

      Tilt angle: -20° to +90°

      Rotation angle: 360°

   (c) Large-size eucentric stage

      Movement range: 100 mm x 50 mm

      Tilt angle: 0° to +60°

      Rotation angle: 360°

   (d) Cool stage 20

      Movement range: 15 mm x 15 mm

      Tilt angle: -45° to +45°

      Temperature range: +10° C to -20° C

   (e) 5-axis stage

      Movement range: 100 mm x 50 mm

      Tilt angle: 0° to +60°

      Rotation angle: 360°

5. Image Display

   (1) Kinds of images:

      - Secondary electron image (only in HIGH VACUUM mode)

      - Back-scattered electron image (Semiconductor method)

   (2) Scanning modes

      - TV scan

      - Slow scan (4 steps)

      - Selected area scan

      - Waveform monitor/signal monitor

      - Photo scan (4 steps)

      - Twin photo scan

      - Dual-magnification scan

   (3) Scanning speeds

      - TV scan

      - Slow 1: 0.35 s (X = 0.7 ms, Y = 480 lines)

      - Slow 2: 2 s (X = 4 ms, Y = 480 lines)

      - Slow 3: 10/8 s (X = 20/16.7 ms, Y = 480 lines)*

      - Slow 4: 20/24 s (X = 40/50 ms, Y = 480 lines)*

      - Selected area:

         70 ms (F) (X = 0.45 ms, Y = 160 lines One-stage filter)

         70 ms (M) (X = 0.45 ms, Y = 16- lines, Two stage filter)

         320 ms (S) (X = 2 ms, Y = 160 lines)

      - Photo 1: 40/33 s (X = 20/16.7 ms, Y = 1920 lines)*

      - Photo 2: 80/100 s (X = 40/50 ms, Y = 1920 lines)*

      - Photo 3: 200/200 s (X = 100/100 ms, Y = 1920 lines)*

      - Photo 4: 400/400 s (X = 200/200 ms, Y = 1920 lines)*

(*: Synchonized with power frequency of 50/60 Hz)

   (4) Signal processing (analog operation

      Image polarity reversal

      Image differentiation

     Gamma Control

   (5) Data display: Accelerating voltage, magnification, micron scale, micron value, film number, W.D. value, date/time, vacuum level, photo magnification, detector

   (6) Data entry: Input through full keyboard (alphabetic characters, numerics, symbols), Graphic input (straight lines, circles, arrows, etc.)

   (7) VTR signal input

6. Image memory

   (1) For display (640 x 480)

   (2) For high resolution (1280 x 960)

   (3) For ultra-high resolution (2560 x 1920) (Option)

   (4) Memory functions: Scan conversion, recursive filter (applicable modes: TV, Slow 1, slow 2), image integration (2 to 1024 images) (Applicable modes: TV, Slow 1 to Slow 4), Brightness conversion (LUT: Look-up table method), Intermediate level emphasis, gamma control, N-ary conversion, Pseudo color, Histogram presentation, 4-split screen presentation

7. Automatic Functions

   - Auto brightness and contrast (ABC)

   - Auto stigmatism and focus (ASF)

   - Auto focus (AFC)

   - Auto filament saturation (AFS)

   - Auto gun alignment (AGA)

   - Auto start (HV-ON-> AFC-> ABC)

   - Auto photographing (1. AFC -> ABC-> Photo) (2. ABC -> Photo)

   - Full auto mode (1: AFS -> AGA-> AFC -> ABC) (2: AGA-> AFC -> ABC)

8. Operation Support Functions

   - Operation principle: Graphical user interface / simplified menus

   - Control devices: Mouse, dedicated rotary knob, full keyboard

   - Magnification presetting (Arbitrary magnification settable)

   - Axial alignment wobbler

   - Condition registration (15 conditions, to be registered unlimitedly)

   - Focus search

   - Focus memory

   - ABC Brightness setting

   - Film sensitivity compensation

   - Photo magnification compensation

   - Photo-only brightness setting

   - Scan point indication

   - Filament image

   - Status list indication

9. X-Ray Analysis Mode

   - Signal input terminals (equipped for each of two systems), X-ray rate meter signal terminal (0 to +10 V), Mapping signal terminal (TTL)

   - Scan mode: Line analysis, spot analysis, selected area analysis

   - Analysis position: W.D = 15 mm, X-ray take-off angle (TOA) = 35°

10. Vacuum System:

   - Principle: Full-auto pneumatic valve control evacuation

   - Vacuum gauge: Pirani Gauge

   - Indications: LED, menus

   - Ultimate vacuum: 1.5 x 10^-3 Pa

   - Variable pressure mode: Variable pressure range: 1 to 270 Pa, Vacuum level setting: Selectable from 25 steps via dialog

   - Vacuum pumps: Oil diffusion pump (DP): 570 L/s for high vacuum, oil rotary pump 1 (RP 1): 135 (162) L/min, for DP back pressure evacuation only, Oil rotary pump 2 (RP 2): 135 (162) L/min, for pre-evacuation/low-vacuum setting

11. Protective devices: Protection against power outage and water supply interruption

12. Standard System Composition:

    - Column unit (1)

    - Display unit (1)

    - PC unit (1)

    - Oil rotary pump (2)

    - Compressor (1)

    - Standard tools (1 set)

    - Spare and consumable parts (1 set)

    - Instruction manual (1 copy)