1997 Hitachi S-4500 Type 11

 Scanning Electron Microscope (SEM)

Wafer Size: 

Equipment Configuration: – Type II

– EDX

1) Performance

Resolution:

- 1.5 nm guaranteed (at accelerating voltage 15 kV, working distance 4mm)

- 4.0 nm guaranteed (at accelerating voltage 1 kV, working distance 3mm)

Magnification:

- High magnification mode: 50x to 500,000x

- Low magnification mode: 20x to 1,500x

- (maximum imaging field: 3.5mm dia.)

2) Electron Optics

- Electron gun: Cold-cathode field emission electron gun

- Emission extracting voltage (Vext): 0 to 6.5 kV

- Accelerating voltage (Vacc): 0.5 to 30 kV (variable in 100 V step)

- Lens system: 3-stage electromagnetic lens

- Objective aperture:

Movable aperture (4 openings selectable/alignable outside column

Self-cleaning type thin aperture

- Stigmator: Electromagnetic type

- Scanning coil: 2-stage electromagnetic type

3) Specimen stage

- Motion X: 0 to 100 mm (continuous)

- Motion Y: 0 to 50 mm (continuous)

- Motion Z (WD): 3 to 33 mm (continuous)

- Motion T (tilt): -5° to +60°

- Motion R (rotation): 360° (continuous)

- Maximum specimen size: 150 mm dia. (airlock specimen exchange)

4) Display Unit

- Principle: Flicker-free display with built-in image memory (at all scan speeds)

- Viewing CRT: 12" display monitor x 2 sets (including an image memory unit)

- Photo CRT: Ultra high resolution type (recording area: 120 x 90 mm) x 1 set

- Scanning mode: Normal scan, split screen/dual magnification, line scan, position setting, spot, AAF (analysis area finder), SAA (selected area analysis), oblique mode

- Scanning speed: 0.3, 2, 10/9, 20/25 s/frame for viewing mode (50/60 Hz) TV, 40/35, 80/100, 160, 320 s/frame for photo recording mode (50/60 Hz)

TV Signal: NTSC or PAL

- Signal processing/operation mode: Automatic brightness & contrast control, gamma control, dynamic stigmator monitor, auto focus, automatic stigmator.

- Recordable/printable data: Film no., accelerating voltage, magnification, micron scale, micron value, date/time and working distance printable on picture

- Data entry: Arbitrary alphanumeric characters and symbols overlayable at any image position through keyboard

- Electrical image shift: ± 20 μm at WD 20 mm

5) Vacuum system:

- Vacuum sequence: Full-auto pneumatic valve system

- Ultimate vacuum: 7 x 10^-4 Pa (specimen chamber) & 1 x 10^-7 Pa (electron gun chamber)

- Vacuum pumps:

- Electron optics: 3 ion pumps

- Specimen chamber: 1 diffusion pump & 2 rotary pumps

- Compressor: 1 unit

*Does not include EDX

1997 Vintage