Lam Research 4520 RAINBOW GAS PANEL
Lam Research 4520 RAINBOW GAS PANEL
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Description
Gas Panel for LAM Research 4520 Rainbow
Includes: Valves and MFCs.
Included:
Unit UFC-1200A
Range 200 SCCM
Gas: CF
Unit UFC-1200
Range: 100 SCCM
Gas: CHF3
Unit UFC-1200A
Range: 50 SCCM
Gas: O2
Unit UFC-1200A
Range: 200 SCCM
Gas: Ar
USED
Specifications
| Manufacturer | Lam Research |
| Model | 4520 RAINBOW GAS PANEL |
| Condition | Used |
| Stock Number | GOD2308201975139382 |