Disco DFD-2S/8 Fully Automatic Dicing Saw

Status: excellent

Application: Dicing/Cutting/Slotting various wafers

◆ X - axis Section

Drive Method: AC Servo Motor

Stroke: 650mm Max

Effective Cut Stroke: 220mm

Cut Speed: 0.7~3000mm/sec

◆ Y - axis Section

Drive Method: Pulse Motor

Max Programmable Stroke: 220mm

Index Speed: 30mm/sec

Indexing Method Min Index StepLinear Scale Closed Loop System 0.001mm

Indexing Accuracy: Single Pitch 0.003mm

Cumulative Pitch 0.005mm/200mm

◆ Z - axis Section

Drive Method: Pulse Motor

Indexing Method: Rotary Encorder

Max Stroke: 25mm

Min Index: 0.002mm

◆ Θ - axis Section

Drive Method: AC Servo Motor

Rotation Angle (end to end): 150 ˚ max

Indexing Time: 2sec/90˚

Min Index Angle: 1.62"

◆ Spindle Section (High Frequency Air Spindle)

Output: 800W

RPM: 3,000 ~ 60,000

◆ Spinner Section

Drive Method: AC Direct Drive

RPM: 3,000rpm MAX

Wash/dry Time: 999 Seconds Max

Wash → Rinse → Dry: Programmable

Accuracy of Table Positioning During Rotation: ± 1 ˚

◆ Alignment Section

Alignment Method: CCD Camera Pattern Matching System

Microscope: Single Object Magnification (a b Selectable):

  Macro Micro

a 2.66 X 7.5 X

b 7.08 X 19.88 X

With Auto Focus Mechanism

◆ Handling Section

Loading/Unloading Section: Cross-Flow Arm System

Number of Cassettes Used (Detting for pitch and Number of Workpieces Can Be Changed): Number of Cassettes 1 for Each Loader/Unloader

8"Φ=1/4" , 26 Slots

3~6" Φ = 3/16" , 25 Slots

◆ Utilities

power Supply

(1) AC 200/220 V: 3 Phase 50/60 Hz (domestic) 5 KVA

(2) AC 200 ~ 415V: *3 Phase 50/60 Hz (Overseas) 5 KVA Transformer Necessary

◆ Water Pressure

Cooling Water (tap Water): 2Kg/㎠ 1.5 Liters/Min

Cutting Water (D.I Water): 3 kg/㎠ 5 Liters/Min

Air Pressure: 5.5kgf/㎠ ㆍG 440 Liters/Min

N: 5.5kgf/㎠ ㆍG - AT Max. use 565 liters/min