2000 LAM Alliance 9100PTX
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Description
Vintage: 2000 11
Wafer size: 8"
Configuration overview: 2ch:Via/CW PM1/2
Tool status: offline, working
Dry etch
Specifications
Manufacturer | LAM |
Model | Alliance 9100PTX |
Year | 2000 |
Condition | Used |
Stock Number | BM397 |