2010 DNS Dainippon Screen SU-3000
2010 DNS Dainippon Screen SU-3000
Contact us for price
Description
Vintage 2010
Wafer size: 300mm
Wet Process – HF Clean
**NO HDD will be included with this tool*
➢ Process : HF Clean
➢ MPC1
➢ MPC2
➢ MPC3
➢ MPC4
➢ Processing unit:
o Backside Nozzle
o 3 Fixed nozzles with holder
o Splash guard
o Scan nozzle home drain port
o Separation box
o Fluid box trap tank
➢ Controllers:
o Industrial Computer (Toshiba model)
o Indexer robot controller
o Chemical cabinet controller
o Servo pack (Yasukawa model)
o Thermal controller (Komatsu model)
o Mass Flow Controller (MFC)
o Loadport controller
o Solenoid controller
➢ Drive mechanisms:
o Indexer Robot (Yasukawa model)
o Loadports (Qty. 3)
o FOUP mapper
o Center Robot (Yasukawa model)
o Chamber Shutter door
o Reversers (Qty.2)
o Spin base (3 movable pins)
o Shield plate
o MPC Scan nozzle 1 Type 3 arm
o MPC Scan nozzle 2 arm
o Chuck Position sensor
o Wafer presence
➢ Safety:
o EMO’s
o Leakage sensors
o Cover interlock sensors
o Tower Lamps
o Flashing Lamps
Specifications
| Manufacturer | DNS Dainippon Screen |
| Model | SU-3000 |
| Year | 2010 |
| Condition | Used |
| Stock Number | BM272 |