1998 TEL CLEAN TRACK ACT 8 SINGLE BLOCK

Single Block (Resist Coater/Developer)

Resist Processing Equipment

Date of Manufacture: 1998-07-31

Currently Configured for: 200mm

Yes/No Yes

Stepper/Scanner FPA-3000i5

Same / Under the floor Under the floor

Concentration/Canister Concentration

COT Yes

DEV Yes

Number 1

Number of Nozzle 6

RRC Yes

Back Rinse Yes

Edge Rinse Yes

Automatic Dumper Yes

Number -

Number of Nozzle -

RRC -

Back Rinse -

Edge Rinse -

Automatic Dumper -

Number 1

Number of Nozzle 2

RRC No

Back Rinse Yes

Edge Rinse Yes

Automatic Dumper Yes

Number 2

Number of Nozzle 1/Unit

Nozzle type SH

Purified water Rinse Yes

DEV rinse No

Back Rinse Yes

Automatic Dumper Yes

CP 4

LHP 5

DHP 1

CHP 2

ADH 1

WEE 1

Cleaning kits for CUP 1

Resist Gllon bin

BARC -

TARC Fab liquid waste

DEV liquid Fab liquid waste