RMS Systems/Hologenix NGS 3500

Defect Detection System

• Automatic Defect Detection & Classification
• Automated Die Inspection
• Precision Dimensional Metrology
• Critical Dimension (CD) and Overlay Metrology
• Automatic and Manual Operation
• Surface & Edge Defect Detection
• Texture Defect Detection (e.g. stains, etc.)
• Missing or Deformed Object Detection
• Extensive Defect Review Capability
• Graphic Maps & Image Archival
• CAD file import

The NGS Series defect detection and metrology systems are designed for applications where automated optical defect detection and precision dimensional measurements on wafers and other parts are required. They are well suited for dual use as production tools or as versatile process development systems. These systems offer a choice of high end microscope components (Olympus/Nikon/Leica), BF/ DF/ DIC illumination, and linear motor staging with 0.02 micron scales. There are several configurations available depending on your requirements. These include:a 200mm platform, a 300mm platform and a robotic platform for automated wafer and part handling.

Advanced wafer level dimensional metrology and defect detection system

motorized stage with 8"x8" XY travel 

motorized focus

brightfield and darkfield inspection

5-100 defects/measurements per second typical

200mm/s staging speed

software controlled coaxial and backlight (transmitted light) with dual 150w fiber optic power supplies

maximum stage load capacity 50lbs

granite base and Z column

closed loop linear stages and Z axis with position feedback and Micro-e Mercury 3500 smart encoder systems provide better then 1um resolution

Software: RMS Vision Systems with color graphics, image archiving, and offline review of defects

Nikon microscope with motorized objective rotation, tilting ultrawide trinocular viewing head with 10x eyepieces

Hitachi CCTV, Windows XP