Lasertec VL-2000

Confocal Microscope for CD measurement and surface profile

408nm GaN (Gallium Nitrite) blue laser confocal microscope for CD measurement and surface profiling

0.14u resolution

1/15th second scan speed

1ZC1 Z axis controller

Nikon microscope with (4)  BD DIC CF Plan objectives: 5x, 10x, 20x, 50x

PC with image capture board and analysis version 3.1.554 image analysis software from Soft Imaging System GmbH