Axcelis GSD HE Implanter
Axcelis GSD HE Implanter
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Description
- 6"
- Wafer can be converted back to 8"
- Refurbished
- Refurbishment of isolation transformer
- All assembly refurbished and fitted with new consumables
- Complete refurbishment of resonant cavities (LINACs, resonator DI boards and RF power supplies)
- Chamber and beamline CO2 cleaned and diamond polished to return to as-new condition
- Two new SAC IHC ion sources
- System tested to original equipment manufacturers specification
Replacement of:
- Both front and rear Cyro pumps by the OEM
- Valves, gate valves, and vacuum valves
- Mechanical and booster pumps
- High voltage power supply
- Terminal power supplies (filament, bias, arc, magnet, source magnet)
- All gas box elements
- All water lines and fittings
- Pneumatic lines where required (inspected)
A low pressure H2 upgrade was performed:
- High level of safety: No stored H2, but on demand instant generation
- No gas stock management
- Very simple and easy-going technology
- Beam performances similar to H2 pressure technology
- Fully CE compliant
Specifications
Manufacturer | Axcelis |
Model | GSD HE Implanter |
Condition | Refurbished |
Stock Number | BM4381 |