Eaton NV-GSD-HE

End station 115 x 94 x 98

Beam line 52 x 96 x 94

Source teminal 59 x 60 x 89

Source housing 66 x 97 x 86

Analyzer 39 x 36 x 68

Power rack1 71 x 31 x 98

Power rack2 24 x 33 x 88

Power rack3 24 x 26 x 87

Pallet-1: End station door / Front door, Misc parts etc 102 x 54 x 28

Pallet-2: Teminal door, Misc parts etc 96 x 56 x 26

Pallet-3: Beam door, Misc parts etc 116 x 43 x 27

Pallet-4: Top plate, Misc parts etc 114 x 45 x 27

Pallet-5: Side plate, Misc parts etc 54 x 60 x 32

Pallet-6: Hood cover, Top panel, Misc parts etc 100 x 72 x 29

Pallet-7: Stack, Lamp, Accessory, Misc parts etc 49 x 47 x 40

Pallet-8: Filter cover, Misc parts etc 80 x 53 x 35

Pallet-9: Filter 61 x 48 x 59

Pallet-10: Compressor, Stage 51 x 44 x 35

Pallet-11: Gas box 42 x 49 x 60

Pallet-12: Analyzer(spare) 42 x 49 x 12

Tote box-1: Helium Hose, Cables, Misc parts etc 40 x 49 x 34

Chiller 34 x 63 x 57

SMIF 17 x 24 x 75

Top plate 1 4 x 165 x 5

Top plate 2 4 x 165 x 5

Helium tube1,2 5 x 155 x 6

Bottom plate

PROCESS: HIGH ENERGY

MOVING TYPE: DISK TYPE

DRY PUMP : N/A

CRYO PUMP : ON BOARD 250F CRYO PUMP ,ON BOARD 10,ON BOARD 8

COMPRESSOR : CTI 9600 , CTI 9600

TMP (TURBO PUMP) : LYBOLD 75M

CHILLER : AFFINITY CCWA -200L-HE-3P LP , AFFINITY RWA -012J-BE03CB

GAS : ARGON , ARSINE ,PHOSPHNE