2011 AMAT Centura EPI

Tool Status Connected

Wafer Size 200 mm

Fab Section Diffusion 

Asset Description AMAT CENTURA EPI BRCM SIGE

Software Version B6.01b

CIM NONE

Process BRCM SIGE

Main System MAIN SYSTEM 1

Handler System Standard SMIF 0

Factory Interface SMIF 0

MAIN AC/SYSTEM CONTROLLER 1