2012 Nexx Systems Apollo HP
2012 Nexx Systems Apollo HP
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Description
Tool Status Running Wafers
Wafer Size 300 mm
Fab Section R&D
Asset Description TEL NEXX APOLLO HP PVD SYSTEM SPT03
Software Version Standard
CIM SECS GEM
Process PVD Sputter 3D
Handler System Standard
Specifications
| Manufacturer | Nexx Systems |
| Model | Apollo HP |
| Year | 2012 |
| Condition | Used |
| Stock Number | BM3665 |