2000 AMAT Centura

Metal Etch. No loadports included.

Tool Status Running Wafers

Wafer Size 200 mm

Fab Section Etch 

Asset Description APPLIED MATERIALS DPS MTAL ETCHER

Software Version 4.7_25

CIM SECS

Process MTAL ETCH

Main System MAIN TOOL 1

CHILLER 3

DRY PUMP 6

ECOSYS 1

AC RACK 1

RF RACK 1