EVG 101 Spin/Spray coater

Spin coating system has been upgraded to a spray coating capability system

There are no known issues as it has never been installed/used and also, all parts are intact and available

The current chuck can accommodate 4" and 6" wafers, but upon changing the chuck size, it becomes suitable for wafer sizes ranging from 3" to 8"

Semi-automatic, with manual loading

suitable dor wafer sizes 3" -8" wafers (with proper chuck)

currently configured for 4" and 6" wafers

one coat module

base frame for one resist processing module including all electronics, pneumatics, tubing for solvents, drain or dumo container, and exhaust lines

manual loading and mechanical pre-aligner (pneumatically actuated)

PC controlled with windows based graphical user interface

password protected access levels

coat chamber PTFE for spin coating

programmable rotational speed for substrate

programmable arm for resist dispense and topside EBR

one cybor pump

syringe dispense option included

external chemical cabinet with two solvents

previously used chemistry: 1813, 1827, acetone and IPA

operations manual and documentation included

excellent condition guaranteed