2006 TEL Trias

Tokyo Electron Ltd Trias 4-Chamber Ti Metal CVD System,

300mm, 200V, 50/60Hz,

w/ dual loadport frontend; transfer chamber;

4ea process chambers assy# 3M87-054098:

Mfg 2006.

Includes: 2ea RF cabinets, each w/ dual Kyosan 1.5kW RF generators & matching controllers; power distribution cabinet;

Trias TB TR2 T2 dual transformer,

BOC Edwards S Abatement Service Module;

mfg 2006.