JEOL JSM 7600 F SEM

Resolution:

- 1nm guaranteed at 15kV SEM mode

- 2.5nm at 1kV in SEM mode

- 1.5nm at 1kV in GB mode

Magnification:

- SEM: x100 (at WD 25mm) to x1,000,000 (at WD 8mm)

- Low-Mag LM mode: x25 to x19,000

Imaging Modes/Detectors:

- SEI: Secondary electron imaging

- LM: Low-magnification mode

- GB: Gentle-Beam mode

Accelerating Voltages:

- SEM: 0.5 to 30kV

- GB: 0.1 to 4.0kV

Mechanical:

- Max: 70 x 50mm

- 4inch wafer: limited to 25x25mm movement area from wafer center

- Tilt: -5* to 70*

- Rotation: 360*