1999 NIKON 1208608

*****See attachments for lens data

PC type Vax 4000/90 ,96 or other WINDOWS 电脑

HDD DKA200, DKA300

SET Temprature Chamber

LLTC

IATC

Main Software MCSV 2.42

Unit Software RL

ALG

PA

STG

LC

WL

Chamber Type SENDAI S19

Reticle Size 6 inch

Reticle microscope Fixed or Moveable Fixed

RA field 22*22

PPD <Yes or Not> No

Reticle Barcode Reader <Yes or Not> Yes

Library Unit 13 Slot

Wafer Chuck Type Ring

Pre2 set have or not Have

Wafer Loader Loader Type Type 3

Wafer size 6 Inch

Notch or Flat Flat

In-Line <Yes or Not> No

Wafer Carrier Table Left/Right/Extra Right/Extra

Alignment sensor LSA <Yes or Not> Yes

FIA <Yes or Not> Yes

LIA <Yes or Not> No

Interferometer Laser Type 5517C

Rack Type Left . Right or extra Left

Lamp Power 1750W or 2000W 2000W

SHRINC None or 1/2/3 3

Signal Tower <Yes or Not> Not

Projection Lens Serial Number -

LLTC leakage <Yes or Not> No