2011 KOKUSAI Quixace II ALD Oxide

Vertical Furnace

Furnaces/Diffusion Systems

Currently Configured for: 300mm

Asset HDD not included

Process: ALDSIOX

Furnace Unit      

Cartridge Heater:D4EX22250, RHC2 Heater

T/C for Heater Control:D4EX15442   

T/C for Sub Heater Control   

T/C for Over temperature Protection:D4EX15442   

5-P T/C for Cascade Control:D4EX29950,L type(5P)

5-P T/C for Profile Control: OPTION

1-P T/C for Profile Control:D4EX21001,OPTION 

Thyristor Unit for Control:SKKT160L5Z4F-HKD,Air cooling type

Clean Unit      

Clean Module Unit:BV-R14TF2G1H-Wafer transfer area(Transfer)

Clean Module Unit:BV-R09TF2G1L-Wafer transfer area(Loading Area)

Clean Module Unit:PCF-8EKD3796-Rotation FOUP Storage(Lower)

Controller      

Main Controller（OU）:D4EX35757(CX5000)   

Main Operation Unit:TM150-HKT02   

Sub Operation Unit:D4EX35758 (KDSC-2005SUBDISP)   

Process Module Controller:D4EX43195(PMC5000)   

DDC Temperature Controller:D4EX36151(CQ1720)-CPU +TC Unit

Gate Drive Unit:D4EX36969(DN-150VR-T5)   

MFC / Pressure Unit:D4EX36215(MFCDNET2)-DeviceNet Remote

FOUP Loader Controller Unit:D4EX36773(Robo5000)-Main Unit

Wafer Handling Controller Unit:D4EX36758(Robo5000)-Sub Unit

Valve / Interlock Control Unit   CJ1G-CPU43H-Made by Omron

Switching HUB:FL SWITCH SFN 8TX   

Signal Tower (Front):LME-402W-RBYG,Red, Blue, Yellow, Green

Signal Tower (Rear)

Signal Tower (Pump)

Gas Flow Pattern Panel:D7EX40367

EDA Controller:D4EX38401 (EDA)

EDA Operation Unit:TM150-HKT02

Drive Mechanisms   

I/O Shutter   

AGV/PGV/OHT Stage   

FOUP Loader   

Rotation FOUP Storage: FOUP receipt number : 16

FOUP Opener:2 Ports

Wafer Detection:25 in one lot.

Wafer Transfer: Lift Transfer

Variable Wafer Pitch Converter   

Boat Elevator   

Boat Changer   

Furnace Port Shutter   

Boat Rotation   

Gas System   

Gas Unit(IGS):N2, NF3

Tape Heater for gas pipe

Exhaust System      

Diaphragm Sensor (1000Torr):631C13TBEH, Made by MKS

Diaphragm Sensor (10Torr):631C11TBEH, Made by MKS

Diaphragm Sensor (10Torr):722B11TCE2FA, Made by MKS

Main Valve:VEC-SHA8-X0326, Made by CKD

Exhaust Piping   

Exhaust Dilution Line   

Reactor Tube Press Leak Line      

Back Ground Line: HCD, H2O, Catalyst, NF3

Jacket Heater for exhaust pipe:D4EX37739,Made by MKS

Seal Cap Heater:ESH-13049-02,Made by SHINWA VANES

Inlet Heater:D4EX33554,Made by TOKYO GIJUTSU

Cold Trap

Safety      

Light Curtain System:SL-C52H, Made by KEYENCE

Other      

AGV I/F UNIT: OPTION

OHT I/F UNIT:DMJ-GB1, Prepared By User (E84 Sensor)

CIDRW CONTROLLER: V700-L22-5,Made by OMRON

AMPLIFIER UNIT: V640-HAM12, Made by OMRON

CIDRW HEAD: V640-HS62,Made by OMRON

CHEMICAL FILTER, Made by TOAMEC

Missing/Damaged Parts List:

None report