DNS 3C/3D

Model: SK-W80B-BVPE “80B”

It appears to be complete and in good shape

2-Body System

DUV Type FFU’s

High Speed IFB Unit

SMIF Indexer

Coater Side Developer Side

3-Coat (1-BARC, 2-Resist) 3-Develop

2-Nozzle BARC, 4-Nozzle Resist 2-SI Nozzle +Prewet

2-LPAH (Low Pressure HMDS) 2-EEW (Optical Edge Exposure)

8-Soft Bake Hot Plates (250°C) 6-PEB Hot Plates

6-Chill Plate 2-Chill Plate