TEL Telius SP-305 SCCM

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Equipment Type: TELIUS-SCCM[2ch]

Fab15 confirmed there were no missing or damaged parts.

[Chamber A]

Chamber type:SCCM

Gas config. (sccm)=FCS full scale

2line(radical distribution control)

Ar(1420)/C4F6(50.3)/C4F8(43)/C5F8(22.4)

C5F8(38.9)/Xe(487.4)/O2(60.8)/O2(561)

CF4(145)/CHF3(163)/CH2F2(57.7)

RF Top 60MHz, max 5000W

RF Btm 2MHz, max 5000W

Temp Top +40~+120?

Wall +40~+80?

ESC -10~+60?

[Chamber B]

Chamber type:SCCM

Gas config. (sccm)=FCS full scale

2line(radical distribution control)

Ar(1420)/C4F6(50.3)/C4F8(43)/C5F8(22.4)

C5F8(38.9)/Xe(487.4)/O2(60.8)/O2(561)

CF4(145)/CHF3(163)/CH2F2(57.7)

RF Top 60MHz, max 5000W

RF Btm 2MHz, max 5000W

Temp Top +40~+120?

Wall +40~+80?

ESC -10~+60?

OEM  TEL

Tool Model  Telius-SP SCCM

Process  Oxide

Software Version (include revision #) Ver2.90-Rev011-VSTD3.30d

System Power Rating  200 AC 3-Phase

Loading Configuration  3 load port   

Vendor Chm ModelChemicals / Gases Used (not to use Micron Proprietary names)

Chm/Unit Position  1  Loder Module  

Chm/Unit Position  2  Process ship 1 Ar,C4F8,O2,CF4,CHF3,CH2F2,N2,He,C5F8,C4F6,Xe

Chm/Unit Position  3  Process ship 2 Ar,C4F8,O2,CF4,CHF3,CH2F2,N2,He,C5F8,C4F6,Xe

Description      QtyTool:      

Controller:  EC 1

MC   3

MFC/Pressure Unit:  FCS-DN 18

FCSWR-DN 4

627BRETDD2P 2

627B11TDC2P   2

Drive Mechanisms:  x-axis: linear motor

y-axis, z-axis, θ: AC SINFONIA servo motor  1

FOUP Opener:  SELOP12F25*   3

Gas System:  Accumulation type(12line) Fujikin   2

Exhuast System:  TMP 2

DP   0

Chiller:  DAIKIN UBRPD5A-2T2   2