2015 Bruker D8 Fabline

Tool status: online

Software version: 77-2.3A-6A-5A-5A-R6A

CIM: E84, SECS/GEM, GEM300

Hardware Configuration (fab):

Main system: D8 FABLINE MH with TXS - 1

High Brightness (2KW) Bruker Rotating Anode HB-TXS

SMIF systems: Spartan EFEM dual load port for 300mm wafers - 2

Brooks Automation

Handler system: Automation software PTO from Peer Group - 1

UMC 300 wafer stage with short tracks on primary side - 1

Options: Primary optics for micro diffraction, TXS X-ray system - 1

LynxEye detector for secondary side + mount - 1

Waferchuck - 1

Others: Pattern recognition software - 1

Keyence laser triangulation module for fast height alignment - 1