2011 Applied Materials Centura Radiance RPO
2011 Applied Materials Centura Radiance RPO
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Description
HDD not included
Wafer Size 300mm
Process Plasma Oxidation
Technology: TP
Platform Type: CENTURA ACP 2X
Application: INTEGRATED GATE
Wafer Size: 300MM (12 INCH)
Wafer Shape: SNNF
Position A: R748 RPO
Position B: R748 RPO
Position C: R748 RPO
Position D: R748 RPO
Mainframe Control: AD Link controller
WIP Delivery Type: OHT WIP DELIVERY
Number of Load Ports: 2 LOAD PORTS
Remote Control System Capable: NO
eDiagnostics Ready: YES
Docked E99 Reading Capability: NO
Load Port Types: SELOP 7
Load Port Operator Interface: STANDARD 8 LIGHT
Configurable Colored Lights: YES
Docking Flange Shield: YES
Ionizing Systems: NONE
Air Intake Systems: TOP INTAKE
E84 Carrier Handoff: UPPER E84 INTERFACE ENABLED OHT
E84 PIO Sensors and Cables: UPPPER E84 DATA LOGGING SENSORS AND CABLES
E99 Carrier ID: TIRIS WITH RF
Operator Access Switch: YES
Carrier ID Host Interface: NO
OHT Light Curtain: LIGHT CURTAIN
Light Towers: 4 COLOR CONFIGURABLE LIGHT TOWER
Single Axis Aligner: YES
Robots: OCR Capability
Factory interface: Interface A
Side Storage PoD: KIT, MIT RIGHT 300MM KAA/YAT, SSP, 5.3FI
Side Storage PoD: KIT, SIDE STORAGE POD MOUNT, NO MID DECK AND PLENU
Mainframe Type: SINGLE CLUSTER 4 FACET, ACP BLOCK 2
Loadlock: SWLLS
Chamber A, B Interface: ENP RAD SS DOOR AL INSERT WITH CHEMRAZ WITH PURGE
Chamber C, D Interface: ENP RAD SS DOOR AL INSERT WITH CHEMRAZ WITH PURGE
LL/Transfer Chamber Pump: Edwards - iXL 180
LL/ Transfer Chamber Baratron: Baratron
O2 analyzer monitoring: RP O2 analyzer
Mainframe Slit Valve: DOOR ACP ALUMINUM VITON
Robot BRG: BRG, 8-INCH HYBRID CERAMIC, SHIELDED, BRAYCOTE 1613
Wrist Assy: ASSEMBLY, 300MM DBR CR HIGH TEMP BELT WRIST, TI
LH wrist: ASSY, LH, CR BELT PIVOT, 300MM ROBOT WRIST
RH wrist: ASSY, RH, CR BELT PIVOT, 300MM ROBOT WRIST
Oring, xfer: ORING LID ACP
Oring ORING ID 10.484 CSD .139 VITON 75DURO BLK
Robot blade Dual blade robot
Slit valve PLATE VITON FACE SEAL REV SS5 LLC SLITVALVE
Oring ORING ID 9.237 CSD .103 VITON 75 DURO BLK
Monitor 1 19 IN FLAT PANEL WITH KEYBOARD ON ERGO ARM
Monitor 1 Cables 25 FEET WITH 16 FEET EFFECTIVE
Heat Exchanger Type None
SEMI F47 YES
System Labels ENGLISH ONLY
RPO Chamber Type RADIANCE 300MM
Technology Option OPEN LOOP TUNER
MFC Type STEC
MFC Mount Type Surface Mount
Core Anneal and RTO YES
Rotation Type WRLD TOXIC
Remote Plasma RPO - Generator
Remote Plasma RPO - Applicator
Chamber Integration Lines Standard
RP Pump cable 81 Feet
Line 1 N2 , 50 SLM
Line 2 H2, 2 SLM
Line 3 H2, 20 SLM
Line 4 Empty
Line 5 N2 Purge
Line 6 Empty
Line 7 Empty
Line 8 Empty
Line 9 O2 5 SLM
Line 10 O2, 50 SLM
Line 11 N2 50 SLM
Line 12 N2 (BP), 50 SLM
Line 13 He (BP), 20 SLM
Line 14 N2 (Maglev), 100 SLM
Maglev LPS POWER SUPPLY, LOCAL, RADIANCE MAGLEV
RPO Chamber Type RADIANCE 300MM
Technology Option OPEN LOOP TUNER
MFC Type STEC
MFC Mount Type Surface Mount
Core Anneal and RTO YES
Rotation Type WRLD TOXIC
Remote Plasma RPO - Generator
Remote Plasma RPO - Applicator
Chamber Integration Lines Standard
RP Pump cable 81 Feet
Line 1 N2 , 50 SLM
Line 2 H2, 2 SLM
Line 3 H2, 20 SLM
Line 4 Empty
Line 5 N2 Purge
Line 6 Empty
Line 7 Empty
Line 8 Empty
Line 9 O2 5 SLM
Line 10 O2, 50 SLM
Line 11 N2 50 SLM
Line 12 N2 (BP), 50 SLM
Line 13 He (BP), 20 SLM
Line 14 N2 (Maglev), 100 SLM
Maglev LPS POWER SUPPLY, LOCAL, RADIANCE MAGLEV
RPO Chamber Type RADIANCE 300MM
Technology Option OPEN LOOP TUNER
MFC Type STEC
MFC Mount Type Surface Mount
Core Anneal and RTO YES
Rotation Type WRLD TOXIC
Remote Plasma RPO - Generator
Remote Plasma RPO - Applicator
Chamber Integration Lines Standard
RP Pump cable 81 Feet
Line 1 N2 , 50 SLM
Line 2 H2, 2 SLM
Line 3 H2, 20 SLM
Line 4 Empty
Line 5 N2 Purge
Line 6 Empty
Line 7 Empty
Line 8 Empty
Line 9 O2 5 SLM
Line 10 O2, 50 SLM
Line 11 N2 50 SLM
Line 12 N2 (BP), 50 SLM
Line 13 He (BP), 20 SLM
Line 14 N2 (Maglev), 100 SLM
Maglev LPS POWER SUPPLY, LOCAL, RADIANCE MAGLEV
RPO Chamber Type RADIANCE 300MM
Technology Option OPEN LOOP TUNER
MFC Type STEC
MFC Mount Type Surface Mount
Core Anneal and RTO YES
Rotation Type WRLD TOXIC
Remote Plasma RPO - Generator
Remote Plasma RPO - Applicator
Chamber Integration Lines Standard
RP Pump cable 81 Feet
Line 1 N2 , 50 SLM
Line 2 H2, 2 SLM
Line 3 H2, 20 SLM
Line 4 Empty
Line 5 N2 Purge
Line 6 Empty
Line 7 Empty
Line 8 Empty
Line 9 O2 5 SLM
Line 10 O2, 50 SLM
Line 11 N2 50 SLM
Line 12 N2 (BP), 50 SLM
Line 13 He (BP), 20 SLM
Line 14 N2 (Maglev), 100 SLM
Maglev LPS POWER SUPPLY, LOCAL, RADIANCE MAGLEV
Specifications
| Manufacturer | Applied Materials |
| Model | Centura Radiance RPO |
| Year | 2011 |
| Condition | Used |
| Stock Number | BM1179 |