2001 SUSS MICROTEC MA6/BA6 aligner 150mm wafer chuck

SUSS MA6/BA6 MASK ALIGNER 

- Model: MA6 / BA6

- Manufacturer: Suss MicroTec 

- Wafer Size: Currently configured for 150mm Diameter Wafers.  

- Topside (TSA) Alignment

- Backside (BSA) Alignment

- Suss DVM6 Microscope

- Objectives:

- UV400 splitfield Optics (for 365nm and 405nm exposure)

- CIC 500 Power Supply

- Capable of Hard, Soft, Vacuum Contact  with proper tooling.

- 1500W Lamphouse

- Vibration Isolation Table (for Suss MA6)

- 150mm Chuck included

- 7x7 Maskholder included

- System Power: 230V, 50/60 Hz

- Operations Manual for Suss MA6 Mask Aligner