Alcatel 4200 dual chamber system

Alcatel 4200 dual chamber system

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Description

It´s a complete system with 2 etch chambers and 6 sided Brooks handler.

We deinstalled it an have it stored in our warehouse.

The sales condition is "as is", from our stock.

We have here all components, cables, hoses as we removed when the system was deinstalled. It can be inspected any time.


List of components:


1 ea. etch module with gas cabinet (CF4, O2, CHF3, He, Ar, N2)

1 ea. etch module with gas cabinet (SF6,O2, O2,N2)

1 Brooks handler platform MX 600 

2 ea. Control cabinet

1 Power distribution cabinet

2 Forepumps ADP122H

2 Forepumps A100L

2 ea. chiller 

1 Transformer 125 KVA

1 GUI, 3 consoles

1 Gas Abatement, Centrotherm

1 box with manuals

6 Boxes with cables, hoses, computer, endpoint det.

Specifications

ManufacturerAlcatel
Model4200 dual chamber system
ConditionUsed
Stock NumberBM858