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1998 TEGAL 901e ETCH SIN SIC
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1999 TEGAL THEIS 903 DRY ETCH BPSG
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Hitachi M-308ATE Metal Etch System w/ Power Rack, Delatech 858 V-2 scrubber, Gas Cabinet
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Parts tool Used
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Mattson Aspen III, Front End Transfer Chamber, Robot, Controller
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Used, parts, Transfer module 12" wafer
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2006 STS / SPTS CPX Pegasus
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Refurbished Condition 2024 200mm wafer size Volts/Hz/Ph: 380Volts/60Hz, 160 Amps/phaseEstimated...
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TEL Unity2E-85IEM
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Axcelis / Fusion 200 MCU Asher
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8 Inch set up
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Axcelis Fusion G03 Ozone Asher. Dual chamber, Dual robot arm
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8inch wafer Used
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Ulvac Enviro Downstream Microwave Asher
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- Single Chamber Advanced Strip System - Computer - ENI OEM-6B RF Generator - 5 MFCs - Brooks...
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JST 3 DRUM PHOS ETCH
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JST 3 DRUM CR ETCH
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JST Etch Bench/ SA0074RO
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