Faceplate, LPCVD, 300mm, DCS-xZ, HD

DOOR, RIGHT SIDE PANEL, 5.3 FI

Numbering exposure

Screw, Cap SKT HD 10-32 x 5/8 Torx T27

CAPTIVE SCREW, 300MM SLIT VALVE

O-Ring ID 2.734 CSD .139 Kalrez 8085

Ultima, HDP, 30K MF PM

SWLL,COOLDOWN PEDESTAL WAFER SUPPORT PI

300mm CDA pressure switch

Electrical Assy DC Power Supply Drawer

Flap, Top, Secondary, Throttle Valve

Ultima, HDP, 30K PM Kit