– 320 – 1* soaking station / 2* process chamber / 2* rinse chamber / 2* 6” I/O Ports / DMC-OCR R...

2 available Exposure MA150

2 available Coating

Wet etching

- SRD 497 (single Tower) Cleaning SRD Semitool PSC-101 - SRD 1306 (Double tower) Cleaning SRD OEM...

– 1 soaking station / 1 process chamber / 1 rinse chamber / 2* 6” I/O Ports

1* process chamber / 1* rinse chamber / 2* 6” and 1* 8” I/O Port

Lift-off

Evaporation