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ASM AMERICA INC EPILSON E3200 300mm
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EPI TOOL (RP OPTION)
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ASM AMERICA INC EAGLE 12 300mm
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VLK ILD DEPOSITION, CU
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APPLIED MATERIALS / AMAT REFELXIONS 300MM
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POLISHER, CU (MESA CLEANER)
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APPLIED MATERIALS / AMAT NEW AERA 300mm
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RETICLE INSPECTION
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SCP / AKRION 9415 200mm
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TW #2 LITHO/TF-CU REGEN
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SCP / AKRION 9415 200mm
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BACK END (CU)
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NIKON PRECISION INC S204 200mm
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248nm (0.68NA) SCANNER
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NIKON PRECISION INC AM-601D
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RETICLE INSPECTION
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METRON TECHNOLOGY ECLIPSE 200mm
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TI/NIV SPUTTER (C4)
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LAM RESEARCH CORPORATION / LRC 200 SERIES 2 200mm
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DSS-W, CU
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LAM RESEARCH CORPORATION / LRC 200 SERIES 2 200mm
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DSS OXIDE/ILS
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HITACHI HTA M712E 200mm
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SHALLOW TRENCH ETCHER
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