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Used Eaton Nova NV6200 end station load lock assembly

End Station Load Lock Assemblies QTY 2

Used Eaton Nova 6200AV Alien equip interface

Harvested from Axcelis 6200AV Implanter Alien equip interface 0906-0114-0001

Used LTX Credence LTX Credence Semiconductor Tester, 97173001-07 PDU-Sapphire

Used Eaton Nova 6200AV Intf cryo Mon Beam

Harvested from Axcelis 6200AV Implanter Intf cryo Mon Beam Unit 4800 3122-0005-0001 Rev E

Used Eaton Nova 6200AV Terminal Interface Chassis

Harvested from Axcelis 6200AV Implanter Terminal Interface Chassis 3122-0006-0001

Used Eaton Nova 6200AV Relay interface Chassis 3122.0007.0001

Harvested from Axcelis 6200AV Implanter Relay interface Chassis 3122.0007.0001 Unit 4500 INTF ...

Used Mattson Rear Chamber Assembly

Mattson Rear Chamber Assembly, New Power Plasma, Unit, Brooks Parts

Used Eaton Nova 6200AV Power One Ion Beam Monitor

Harvested from Axcelis 6200AV Implanter End Station Cryo Monitor Chassis INTF cryo mon es 3122...

Used SELA EM2 precision dicing saw

Used SEM and TEM

Used ASM ASM MS100 Device Mapper Sorter

Used

Used ASM ASM LPT08 Taping & Packaging Machine, 131204

Parts

Used 1996 ASML PAS 5500 /250C

i-Line stepper Installed S/W 8.8.6.c WAFER SIZE: 200mm