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KLA-Tencor Surfscan 6220 Defect Inspection System
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- Upgraded from 6220 to 6420 - Refurbished in 2016
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2005 Takaya 8400 Win XP
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2005
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Lambda Technologies Microcure 5100
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2007 Unitek Eapro 61P0055
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2007 F&K Delvotek 5630
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Olympus OLS 5100 Microscope
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- High magnification - Differential interference contrast (DIC) - Laser scanning microscopy (LS...
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Philips/ Panalytical X'Pert
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Analytical X-Ray It’s X’pert pro mode, high resolution HRXRD can measure up 100mm size wafer.
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Plasmatherm GEN4 MASK IV
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GEN4 MASK IV
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Onto Innovations RPM BLUE FS
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Metrology
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Nuflare Technology, Inc. EBM-8000
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EBM-8000
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Nikon S320
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193NM scanner
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Lasertec USA Inc. BD100
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BD100
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