Nikon 4S015-151AN(4S015-119-A),4S015-119-NK386SX4

BMU

X/Y Active Damping drive AMP

Wafer Stage X Drive AMP.

Right coarse reticle stage drive AMP

170kHz Dual Sweep Pulse Generator & Power Module

model number: cm230gj-112976 parker compumotor location 3A

model number:tm16e10 1-1-A ratio 10 location 3A

Fuji model number: EGA52A earth leakage breaker 100-100-200-140V 50A 15mA location G2

model number: SRC-3631-02(4a) 200-240V/380V 500-550V 2.2kw/2.2kw/2.2kw/2.2kw/ aci=17A aer=20A loc...

model number:SRC-3631-0 200-240V/380V/ 500-550V 2.2kw /2.2kw /2.2kw aci=17A aer=20A location 2G

model number:SC-031G Fuji electric magnetic contacter max rating hp(3ph) ith =11A 200-220-240-440...